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  1. An Introduction to Microelectromechanical Systems Engineering 2nd Ed.
  2. Lecture 01 introduction to mems
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System Issues 3 Electronics, feedback, and noise. Descriptions, specifications and design goals for this term's projects will be provided later in the term. Each project will have a team of four or five students. Depending on enrollment, there may be more than one team on a given topic.


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A fast dielectrophoretic cell sorter Cell sorting is a commonly used biological technique that can isolate target cells from a bulk population based on differences in size, shape, or molecular specificity. The sorter will be created out of PDMS on glass and will use dielectrophoresis to push incoming cells into one of two outlet microchannels.

In the process you will couple it to an optically based detection system, actuation electronics, and identify the fundamental limits on sorting. A piezoresistive sensor for biomolecular recognition The goal of this project is to create cantilever-based device that detects stress induced by molecular binding. Two cantilevers operated differentially will be created out of SU-8 with integrated poly-Si piezoresistors.

The packaged device will be used in a hand-held point-of-care diagnostic monitor and so must be robust, small, and connected to a circuit that gives an output proportional to the logarithm of the concentration ratio. The goal of this project is to design a surface-micromachined silicon resonator or combination of resonators that are used to create an if filter for incorporation into a one-chip radio.

A micro flex-tester for measuring the compliance of microstructures The goal of this project is to build a microfabricated force-displacement sensor device to characterize the compliance of microstructures.


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  • The micro-flextester is a metrology tool used to measure the actual force-displacement characteristic of microfabricated compliant structures. You will select a sensing scheme i.

    An Introduction to Microelectromechanical Systems Engineering 2nd Ed.

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    Lecture 01 introduction to mems

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